Feature

Measures the sheet resistance(Ω/sq) & resistivity(Ω·cm) of Wafer (up to 12 inches), Thin film, etc.
Full remote control & Data Anaysis
Easy to use
Multi - function


Configuration

Four point probe head unit.
The system consists of following components.
. Bridge type X-Y-Z Axis Robot.
. Sample stage for Flat panel.
. LED for process signal.
. Remote control communication port.
. Power key switch
. Operating & Analysis Software
. Standard accessories
- Power connection cable.
- Remote control communication cable.
- Operating & service manual.


Specification

1. Measurement Range
1 mΩ/sq ~ 2 MΩ/sq ( V/I = 0.2 mΩ ~ 450kΩ)

2. Probe Head
Convenient plug-in probe head / adapter assembly permits changing or replacing have worn probe heads in minutes without special tools or alignment fixtures.
Jandel probe heads are provided as standard equipment.

3. Measurement Time
Approx. 3±1sec/point

4. Electronic Accuracy
0.5% for V/I of 5mΩ to 10KΩ at ambient temperature of 23°C±1

5. Maintenance & Service
The microprocessor based electronics employ state of the art component for trouble free operation and high reliability.
All electronic components mounted on easily replaced printed boards

6. Operating software
Full remote control (RS232C Interface) & Data analysis software (windows version)
Lifetime FREE software upgrades






7. Options
Spare Probe Head, VLSI Standard Wafer, etc