Introduction

The CMT-SR 3000N is a measurement system for sheet resistance and Resistivity of a plain rectangle sample such as LCD, ITO, TFT, Thin Film, etc. And it is designed to work for remote function to meet automation such as automatic sample loading. This system is designed for easy operation by a personal computer with exclusive software, and this software has function for various data analyses, mapping and etc.


Feature

. X-Y-Z axis full automatic system.
. Automatic range selection.
. Dimension of measurement is max 1100 × 1300 mm
. Perfect remote control by operating software.
. Data analysis.(2D, 3D mapping / Diameter scan / Trend chart, etc)
. Anti Static System.
. Glass unloads positioning.


Configuration

Four point probe head unit.
The system consists of following components.
. Bridge type X-Y-Z Axis Robot.
. Sample stage for Flat panel.
. LED for process signal.
. Remote control communication port.
. Power key switch
. Operating & Analysis Software
. Standard accessories
- Power connection cable.
- Remote control communication cable.
- Operating & service manual.


Specification

1. Sheet resistance
Measuring method : Contacted by four-point probe
Measuring range : 1 mΩ/sq - 2 MΩ/sq

2. Resistivity
Measuring method: Contacted by four-point probe(Input thickness)
Measuring range: 10.0 µΩ·cm - 200.0 KΩ·cm

3. Current source range
10nA to 100mA
DVM 0V to 2,000mV

4. Measurement Accuracy
Accuracy: 0.2 % (KRISS Circuits)
±0.5 % (VLSI Standard Wafer, When 23°C)
5. Operating softwar
- Measurement condition creation.
- Sample size, measure point interval, test mode, etc
- Save & load : Data, Sample type, measure point, etc.
- Data analysis : 2D, 3D mapping, Data map, etc.
- Data & mapping printout.
- Measurement mode (S/W)
- Auto measurement : Point interval designation by user.
- Quick measurement : 9, 13, 25 pattern Quick Mode.
- Point measurement : Appointment on wafer by mouse.
- Manual measurement : Appointment on wafer by arrow key.


6. Standard Specimen
Rectangle type sample
- CMT-SR3000S: Max 350 × 450 mm
- CMT-SR3000M: Max 550 × 650 mm
- CMT-SR3000L : Max 600 × 720 mm
- CMT-SR3000L4G : Max 730 × 920 mm
- CMT-SR3000L5G : Max 1100 × 1300 mm

7. Measuring time

Approx. 3 ± 1 sec/point

8. Software (Windows 95 / 98 / NT)
Operating personal computer : IBM PC/AT Compatible Pentium
Connect COM port of PC with COM port of CMT-SR 3000N







9. Utility requirements
Power requirements
Line voltage : AC 230V ±10%
Electric power : 100 W, 500 mA
Line frequency : 50 Hz
Air requirements
Line press: 200 mmHg

10. Outside Dimensions
SR3000S:650mm(W) × 900mm(D) × 350mm(H)
SR3000M:700mm(W) × 950mm(D) × 350mm(H)
SR3000L: 800mm(W) × 1050mm(D) × 350mm(H)

11. Recommendable Operating environment
Temperature range : 23°C ± 1°C
Relative humidity : 30 - 70 %