Features

- Auto contact system
- Auto range selection
- High quality probe head
- Full remote control & Data Anaysis software(Windows Version)
- ASTM & SEMI quick measurement mode


Configuration

Four point probe head unit.
The system consists of following components.
. X-Y-Z axis full automatic system.
. Remote control communication port.
. Vacuum connector. (200mmHg)
. Operating & Analysis Software
. Standard accessories
- Power connection cable.
- Remote control communication cable.
- Operating & service manual.


Specification

1. Sheet resistance
Measuring method: Contact by 4-point probe
Measuring range: 1 mΩ/sq - 2 MΩ/sq

2. Resistivity
Measuring method: Contact by 4-point probe (Input thickness)
Measuring range: 10.0 µΩ·cm - 200.0 KΩ·cm

3. Current source range
DC Current: 10nA - 100mA
DVM: 0V - 2,000mV

4. Measurement accuracy
±0.5% (VLSI Standard wafer, when 23°C)

5. Operating software
Full remote control (RS232C Interface) & Data analysis software
Lifetime FREE software upgrades





6. Specimen & Measuring
Wafer: Max 8″

7. Measuring time
Approx. 3 ±1 sec/point

8. Power requirement
Line voltage: AC 220V ±10%
Electric power : 40W, 500mA
Line frequency: 50 - 60 Hz

9. Outside dimensions
254(W) × 562(D) × 260mm(H)