Resistivity Standards (RS) and Sheet Resistance Standards are 3 inch as-lapped silicon wafer designed for calibrating both contact and non contact resistivity measuring instruments. These products are created by sawing a doped single crystalline ingot into wafers and then lapping and chemically cleaning them to VLSI Standards’ specifications.

All measurement of these standards have been done in accordance with ASTM Method  F-84, with the added step of measuring the standard in a dark box that has been shielded and grounded. These products are measured at a single point in the center of the wafer(±5mm) and corrected to a temperature factor of 23℃.


3 inch Resistivity Standards

Model No. Silicon Wafer type Bulk Resistivity S. Resistance RS3-0.002 p-type <100> 0.002 Ω ·cm 0.04Ω /sq RS3-3.0 p-type <111> 3 Ω ·cm 60 Ω /sq RS3-180 p-type <100> 180 Ω ·cm 3500 Ω /sq

Sheet Resistance Standards

Model No. Silicon Wafer type S. Resistance Thickness RS3-0.002 As-lapped Wafer 20~25m Ω /sq 635 ㎛ RS3-4 As-lapped Wafer 3 ~6Ω/sq 381㎛